Products for Excimer Laser Lithography

Below are some of the products our customers use for excimer laser lithography applications. The list is not exhaustive, so if you have a particular application you can't find a product for, please contact us - we will be happy to help.

LTB Lasertechnik Berlin

Elias Spectrometers. The Elias emission line analysing spectrometer from LTB is an echelle spectrometer with an extremely high resolution capability. It is used for the highly resolving spectral measurement of emission and absorption lines, particularly laser lines.